I appreciate your concerns and grievances regarding your manager. Unfortunately, you are focusing on your exit interview to air your concerns and this is very much the wrong place and time.
(1) When your manager made the thoughtless and insensitive remarks at your daughters funeral, those remarks are best left alone as they are what they are, thoughtless and insensitive.
(2) When your manager touched you the first time, you should have told him calmly but firmly in public to not touch you and made a timely written account of the incident and filed it. If he did it a second time, you should have gone to HR and reported it immediately, bringing your record of the initial incident with you. By letting it go until your exit interview, you have greatly diminished your opportunity to achieve permanent corrective action. Exit interviews are frequently dumping grounds for airing personaility conflicts and even though this isn't the case in your situation, will probably result in no action unless there are following additional reports.
(3) Your manager's inappropriate atheist vs religious discussions are somewhere between (1) and (2) above. It sounded more like he was trying to make you an unwilling debater on an uncomfortable to discuss subject than actually harrass you. Still, for a manager to even mention religion on the job indicates the manager is dumb as a stump.
Sadly, you've kind of let the horse out of the barn at this point. So, at the exit interview, I'd mention calmly both the touching and religious discussion incidents and hand them a record of the dates, times and witnesses. Just say you thought they should know this so they can help Mr X improve his professionalism and that you expect no follow-up and consider it settled. They'll be watching him.
Good luck! Enjoy ER! All the best to ya!